Synthesis of silicon oxynitride from a polymeric precursor; hydrolysis of dichloromethylsilane.
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| Title: | Synthesis of silicon oxynitride from a polymeric precursor; hydrolysis of dichloromethylsilane. |
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| Authors: | Yu, Ga-Er, Parrick. J., Edirisinghe, M. |
| Source: | Journal of Materials Science; August 1 1993, Vol. 28, p4250-4254, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00222461 |
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| DOI: | 10.1007/BF00351262 |
