Very low resistance non-alloyed and in situ ohmic contacts to n-GaAs using δ-doped surface layers.
Saved in:
| Title: | Very low resistance non-alloyed and in situ ohmic contacts to n-GaAs using δ-doped surface layers. |
|---|---|
| Authors: | Missous, M., Taskin, T. |
| Source: | Semiconductor Science & Technology; October 1993, Vol. 8, p1848-1853, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
|---|---|
| DOI: | 10.1088/0268-1242/8/10/010 |
