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Optical characterization in microelectronics manufacturing.

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Bibliographic Details
Title: Optical characterization in microelectronics manufacturing.
Authors: Perkowitz, S., Seiler, D. G., Duncan, W. M.
Source: Journal of Research of the National Institute of Standards & Technology; September/October 1994, Vol. 99, p605-639, 35p
Database: Applied Science & Technology Source
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