Determination of thickness of multiple layer thin films by an x-ray-diffraction technique.
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| Title: | Determination of thickness of multiple layer thin films by an x-ray-diffraction technique. |
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| Authors: | Chaudhuri, J., Hashmi, F. |
| Source: | Journal of Applied Physics; October 1 1994, Vol. 76, p4454-4456, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.357275 |