Synthesis of silicon oxynitride from a polymeric precursor; polymerization and copolymerization of methylcyclosiloxanes and methylcyclosilazanes.
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| Title: | Synthesis of silicon oxynitride from a polymeric precursor; polymerization and copolymerization of methylcyclosiloxanes and methylcyclosilazanes. |
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| Authors: | Yu, Ga-Er, Parrick, J., Edirisinghe, M. |
| Source: | Journal of Materials Science; November 1 1994, Vol. 29, p5569-5575, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00222461 |
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| DOI: | 10.1007/BF00349948 |
