Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.
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| Title: | Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes. |
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| Authors: | Marks, M. R., Kintrup, L., Bittigau, K. |
| Source: | Vacuum; March 1995, Vol. 46, p281-286, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/0042-207X(94)00060-3 |
