APA (7th ed.) Citation

Marks, M. R., Kintrup, L., & Bittigau, K. (1995). Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes. Vacuum, 46, 281. https://doi.org/10.1016/0042-207X(94)00060-3

Chicago Style (17th ed.) Citation

Marks, M. R., L. Kintrup, and K. Bittigau. "Small Area X-ray Photoelectron Spectroscopy (SAXPS) Analysis of Microscopic Contamination in Semiconductor Materials and Processes." Vacuum 46 (1995): 281. https://doi.org/10.1016/0042-207X(94)00060-3.

MLA (9th ed.) Citation

Marks, M. R., et al. "Small Area X-ray Photoelectron Spectroscopy (SAXPS) Analysis of Microscopic Contamination in Semiconductor Materials and Processes." Vacuum, vol. 46, 1995, p. 281, https://doi.org/10.1016/0042-207X(94)00060-3.