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Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.

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Bibliographic Details
Title: Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.
Authors: Marks, M. R., Kintrup, L., Bittigau, K.
Source: Vacuum; March 1995, Vol. 46, p281-286, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500246062
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Marks%2C+M%2E+R%2E%22">Marks, M. R.</searchLink><br /><searchLink fieldCode="AU" term="%22Kintrup%2C+L%2E%22">Kintrup, L.</searchLink><br /><searchLink fieldCode="AU" term="%22Bittigau%2C+K%2E%22">Bittigau, K.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; March 1995, Vol. 46, p281-286, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500246062
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/0042-207X(94)00060-3
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 281
    Titles:
      – TitleFull: Small area x-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Marks, M. R.
      – PersonEntity:
          Name:
            NameFull: Kintrup, L.
      – PersonEntity:
          Name:
            NameFull: Bittigau, K.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: March 1995
              Type: published
              Y: 1995
          Identifiers:
            – Type: issn-print
              Value: 0042207X
          Numbering:
            – Type: volume
              Value: 46
          Titles:
            – TitleFull: Vacuum
              Type: main
ResultId 1