Electrochemical coupling effects on the corrosion of silicon samples in HF solutions.

Saved in:
Bibliographic Details
Title: Electrochemical coupling effects on the corrosion of silicon samples in HF solutions.
Authors: Torcheux, L., Mayeux, A., Chemla, M.
Source: Journal of the Electrochemical Society; June 1995, Vol. 142, p2037-2046, 10p
Database: Applied Science & Technology Source
Description
ISSN:00134651
DOI:10.1149/1.2044237