Electrochemical coupling effects on the corrosion of silicon samples in HF solutions.
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| Title: | Electrochemical coupling effects on the corrosion of silicon samples in HF solutions. |
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| Authors: | Torcheux, L., Mayeux, A., Chemla, M. |
| Source: | Journal of the Electrochemical Society; June 1995, Vol. 142, p2037-2046, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2044237 |