Preferential sputtering and surface binding energy in metal silicides.
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| Title: | Preferential sputtering and surface binding energy in metal silicides. |
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| Authors: | Zaporozchenko, V. I., Stepanova, M. G., Vojtusik, S. S. |
| Source: | Vacuum; May 1996, Vol. 47, p421-424, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/0042-207X(96)00002-4 |
