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Morphological evolution of the low-temperature oxidation of silicon with a gold overlayer.

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Bibliographic Details
Title: Morphological evolution of the low-temperature oxidation of silicon with a gold overlayer.
Authors: Chen, C. R., Chen, L. J.
Source: Journal of Applied Physics; July 15 1995, Vol. 78, p919-925, 7p
Database: Applied Science & Technology Source
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