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Temperature dependence of the biaxial modulus, intrinsic stress and composition of plasma deposited silicon oxynitride films.

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Bibliographic Details
Title: Temperature dependence of the biaxial modulus, intrinsic stress and composition of plasma deposited silicon oxynitride films.
Authors: Harding, David R., Ogbuji, Linus U. T., Freeman, Mathieu J.
Source: Journal of Applied Physics; August 1 1995, Vol. 78, p1673-1680, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500311786
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Temperature dependence of the biaxial modulus, intrinsic stress and composition of plasma deposited silicon oxynitride films.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Harding%2C+David+R%2E%22">Harding, David R.</searchLink><br /><searchLink fieldCode="AU" term="%22Ogbuji%2C+Linus+U%2E+T%2E%22">Ogbuji, Linus U. T.</searchLink><br /><searchLink fieldCode="AU" term="%22Freeman%2C+Mathieu+J%2E%22">Freeman, Mathieu J.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; August 1 1995, Vol. 78, p1673-1680, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500311786
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.360263
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1673
    Titles:
      – TitleFull: Temperature dependence of the biaxial modulus, intrinsic stress and composition of plasma deposited silicon oxynitride films.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Harding, David R.
      – PersonEntity:
          Name:
            NameFull: Ogbuji, Linus U. T.
      – PersonEntity:
          Name:
            NameFull: Freeman, Mathieu J.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 08
              Text: August 1 1995
              Type: published
              Y: 1995
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 78
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1