Wall profile developments in through-mask electrochemical micromachining of invar alloy films.
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| Title: | Wall profile developments in through-mask electrochemical micromachining of invar alloy films. |
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| Authors: | Kwon, G.-J., Sun, H.-Y., Sohn, H.-J. |
| Source: | Journal of the Electrochemical Society; September 1995, Vol. 142, p3016-3020, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2048678 |
