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Wall profile developments in through-mask electrochemical micromachining of invar alloy films.

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Bibliographic Details
Title: Wall profile developments in through-mask electrochemical micromachining of invar alloy films.
Authors: Kwon, G.-J., Sun, H.-Y., Sohn, H.-J.
Source: Journal of the Electrochemical Society; September 1995, Vol. 142, p3016-3020, 5p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500322295
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Wall profile developments in through-mask electrochemical micromachining of invar alloy films.
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  Data: <searchLink fieldCode="AU" term="%22Kwon%2C+G%2E-J%2E%22">Kwon, G.-J.</searchLink><br /><searchLink fieldCode="AU" term="%22Sun%2C+H%2E-Y%2E%22">Sun, H.-Y.</searchLink><br /><searchLink fieldCode="AU" term="%22Sohn%2C+H%2E-J%2E%22">Sohn, H.-J.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; September 1995, Vol. 142, p3016-3020, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500322295
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2048678
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 5
        StartPage: 3016
    Titles:
      – TitleFull: Wall profile developments in through-mask electrochemical micromachining of invar alloy films.
        Type: main
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          Name:
            NameFull: Kwon, G.-J.
      – PersonEntity:
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            NameFull: Sun, H.-Y.
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            NameFull: Sohn, H.-J.
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            – D: 01
              M: 09
              Text: September 1995
              Type: published
              Y: 1995
          Identifiers:
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              Value: 00134651
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              Value: 142
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            – TitleFull: Journal of the Electrochemical Society
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