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1/f noise as an electromigration characterization tool for W-plug vias between TiN/Al-Cu/TiN metallizations.

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Bibliographic Details
Title: 1/f noise as an electromigration characterization tool for W-plug vias between TiN/Al-Cu/TiN metallizations.
Authors: Çelik-Butler, Z.
Source: Solid-State Electronics; July 1996, Vol. 39, p999-1003, 5p
Database: Applied Science & Technology Source
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