Interferogram analysis based on the data-dependent systems method for nanometrology applications.
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| Title: | Interferogram analysis based on the data-dependent systems method for nanometrology applications. |
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| Authors: | Pandit, S. M., Jordache, N. |
| Source: | Applied Optics; October 10 1995, Vol. 34, p6695-6703, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036935 |
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| DOI: | 10.1364/AO.34.006695 |
