Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers.
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| Title: | Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers. |
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| Authors: | Yu, Ga-Er, Edirisinghe, Mohan, Finch, D. |
| Source: | Journal of Materials Science; November 1 1995, Vol. 30, p5371-5380, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00222461 |
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| DOI: | 10.1007/BF00351546 |
