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Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers.

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Title: Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers.
Authors: Yu, Ga-Er, Edirisinghe, Mohan, Finch, D.
Source: Journal of Materials Science; November 1 1995, Vol. 30, p5371-5380, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500347554
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers.
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      – Type: doi
        Value: 10.1007/BF00351546
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      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 5371
    Titles:
      – TitleFull: Synthesis of silicon oxynitride from a polymeric precursor. Part IV: pyrolysis of the copolymers.
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            NameFull: Yu, Ga-Er
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            NameFull: Edirisinghe, Mohan
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            NameFull: Finch, D.
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            – D: 01
              M: 11
              Text: November 1 1995
              Type: published
              Y: 1995
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              Value: 30
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            – TitleFull: Journal of Materials Science
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