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Microstructures of parylene-N thin films and the effect on copper diffusion.

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Bibliographic Details
Title:	Microstructures of parylene-N thin films and the effect on copper diffusion.
Authors:	Yang, G.-R., Mathur, D., Wu, X. M.
Source:	Journal of Electronic Materials; November 1996, Vol. 25, p1778-1783, 6p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-996-0035-y