Preferred orientation and piezoelectricity in sputtered ZnO films.
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| Title: | Preferred orientation and piezoelectricity in sputtered ZnO films. |
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| Authors: | Gardeniers, J. G. E., Rittersma, Z. M., Burger, G. J. |
| Source: | Journal of Applied Physics; June 15 1998, Vol. 83 Issue 12, p7844-7854, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.367959 |
