Spatial characterization of doped SiC wafers by Raman spectroscopy.
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| Title: | Spatial characterization of doped SiC wafers by Raman spectroscopy. |
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| Authors: | Burton, J. C., Sun, L., Pophristic, M. |
| Source: | Journal of Applied Physics; December 1 1998, Vol. 84 Issue 11, p6268-6273, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.368947 |
