Ion milling damage and regrowth of oxide substrates studied by ion channeling and atomic force microscopy.
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| Title: | Ion milling damage and regrowth of oxide substrates studied by ion channeling and atomic force microscopy. |
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| Authors: | Takeuchi, I., Sharma, R. P., Choopun, S. |
| Source: | Applied Physics Letters; June 9 1997, Vol. 70, p3098-3100, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.119103 |
