Structural and chemical characterization of as-deposited microcrystalline indium oxide films prepared by dc reactive magnetron sputtering.

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Bibliographic Details
Title:	Structural and chemical characterization of as-deposited microcrystalline indium oxide films prepared by dc reactive magnetron sputtering.
Authors:	Xirouchaki, C., Moschovis, K., Chatzitheodoridis, E.
Source:	Journal of Electronic Materials; January 1999, Vol. 28 Issue 1, p26-34, 9p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-999-0190-z