Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone.
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| Title: | Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone. |
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| Authors: | Moon, B. K., Isobe, C., Aoyama, J. |
| Source: | Journal of Applied Physics; February 1 1999, Vol. 85 Issue 3, p1731-1738, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.369339 |
