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Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone.

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Title: Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone.
Authors: Moon, B. K., Isobe, C., Aoyama, J.
Source: Journal of Applied Physics; February 1 1999, Vol. 85 Issue 3, p1731-1738, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500486305
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone.
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  Data: <searchLink fieldCode="AU" term="%22Moon%2C+B%2E+K%2E%22">Moon, B. K.</searchLink><br /><searchLink fieldCode="AU" term="%22Isobe%2C+C%2E%22">Isobe, C.</searchLink><br /><searchLink fieldCode="AU" term="%22Aoyama%2C+J%2E%22">Aoyama, J.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; February 1 1999, Vol. 85 Issue 3, p1731-1738, 8p
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/1.369339
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      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 1731
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      – TitleFull: Insulating properties of tantalum pentoxide capacitor films obtained by annealing in dry ozone.
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            NameFull: Moon, B. K.
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            NameFull: Isobe, C.
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            NameFull: Aoyama, J.
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            – D: 01
              M: 02
              Text: February 1 1999
              Type: published
              Y: 1999
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              Value: 85
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            – TitleFull: Journal of Applied Physics
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