Surface quality of tribochemically polished silicon nitride.
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| Title: | Surface quality of tribochemically polished silicon nitride. |
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| Authors: | Hah, S. R., Burk, C. B., Fischer, T. E. |
| Source: | Journal of the Electrochemical Society; April 1999, Vol. 146 Issue 4, p1505-1509, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1391795 |
