APA (7th ed.) Citation

Hah, S. R., Burk, C. B., & Fischer, T. E. (1999). Surface quality of tribochemically polished silicon nitride. Journal of the Electrochemical Society, 146(4), 1505. https://doi.org/10.1149/1.1391795

Chicago Style (17th ed.) Citation

Hah, S. R., C. B. Burk, and T. E. Fischer. "Surface Quality of Tribochemically Polished Silicon Nitride." Journal of the Electrochemical Society 146, no. 4 (1999): 1505. https://doi.org/10.1149/1.1391795.

MLA (9th ed.) Citation

Hah, S. R., et al. "Surface Quality of Tribochemically Polished Silicon Nitride." Journal of the Electrochemical Society, vol. 146, no. 4, 1999, p. 1505, https://doi.org/10.1149/1.1391795.