View in EDS

Surface quality of tribochemically polished silicon nitride.

Saved in:
Bibliographic Details
Title: Surface quality of tribochemically polished silicon nitride.
Authors: Hah, S. R., Burk, C. B., Fischer, T. E.
Source: Journal of the Electrochemical Society; April 1999, Vol. 146 Issue 4, p1505-1509, 5p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500510451
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Surface quality of tribochemically polished silicon nitride.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Hah%2C+S%2E+R%2E%22">Hah, S. R.</searchLink><br /><searchLink fieldCode="AU" term="%22Burk%2C+C%2E+B%2E%22">Burk, C. B.</searchLink><br /><searchLink fieldCode="AU" term="%22Fischer%2C+T%2E+E%2E%22">Fischer, T. E.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; April 1999, Vol. 146 Issue 4, p1505-1509, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500510451
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.1391795
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 5
        StartPage: 1505
    Titles:
      – TitleFull: Surface quality of tribochemically polished silicon nitride.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Hah, S. R.
      – PersonEntity:
          Name:
            NameFull: Burk, C. B.
      – PersonEntity:
          Name:
            NameFull: Fischer, T. E.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 04
              Text: April 1999
              Type: published
              Y: 1999
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 146
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
ResultId 1