View in EDS PDF Full Text

Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors.

Saved in:
Bibliographic Details
Title: Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors.
Authors: Tabib-Azar, M., Akinwande, D., Ponchak, G. E.
Source: Review of Scientific Instruments; July 1999, Vol. 70 Issue 7, p3083-3086, 4p
Database: Applied Science & Technology Source
Description
ISSN:00346748
DOI:10.1063/1.1149871