Investigation of silicon oxide films prepared by room-temperature ion plating.
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| Title: | Investigation of silicon oxide films prepared by room-temperature ion plating. |
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| Authors: | Yeh, Ching-Fa, Chen, Tai-Ju, Fan, Ching-Lin |
| Source: | Journal of Applied Physics; January 15 1998, Vol. 83, p1107-1113, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.366801 |
