APA (7th ed.) Citation

Yeh, C., Chen, T., & Fan, C. (1998). Investigation of silicon oxide films prepared by room-temperature ion plating. Journal of Applied Physics, 83, 1107. https://doi.org/10.1063/1.366801

Chicago Style (17th ed.) Citation

Yeh, Ching-Fa, Tai-Ju Chen, and Ching-Lin Fan. "Investigation of Silicon Oxide Films Prepared by Room-temperature Ion Plating." Journal of Applied Physics 83 (1998): 1107. https://doi.org/10.1063/1.366801.

MLA (9th ed.) Citation

Yeh, Ching-Fa, et al. "Investigation of Silicon Oxide Films Prepared by Room-temperature Ion Plating." Journal of Applied Physics, vol. 83, 1998, p. 1107, https://doi.org/10.1063/1.366801.