Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates.
Saved in:
| Title: | Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates. |
|---|---|
| Authors: | Mustapha, N., Howson, R. P. |
| Source: | Vacuum; February 1998, Vol. 49 Issue 2, p75-79, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
|---|---|
| DOI: | 10.1016/S0042-207X(97)00011-0 |
