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Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates.

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Bibliographic Details
Title: Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates.
Authors: Mustapha, N., Howson, R. P.
Source: Vacuum; February 1998, Vol. 49 Issue 2, p75-79, 5p
Database: Applied Science & Technology Source
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