Improvement in buried silicon nitride silicon-on-insulator structures by fluorine-ion implantation.
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| Title: | Improvement in buried silicon nitride silicon-on-insulator structures by fluorine-ion implantation. |
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| Authors: | Rauthan, C. M. S., Virdi, G. S., Pathak, B. C. |
| Source: | Journal of Applied Physics; April 1 1998, Vol. 83 Issue 7, p3668-3677, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.366587 |
