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Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.

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Bibliographic Details
Title: Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films.
Authors: Pichon, L., Straboni, A., Girardeau, T.
Source: Journal of Applied Physics; January 15 2000, Vol. 87 Issue 2, p925-932, 8p
Database: Applied Science & Technology Source
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