Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope.

Saved in:

Bibliographic Details
Title:	Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope.
Authors:	Tabib-Azar, M., Akinwande, D.
Source:	Review of Scientific Instruments; March 2000, Vol. 71 Issue 3, p1460-1465, 6p
Database:	Applied Science & Technology Source

Description
ISSN:	00346748
DOI:	10.1063/1.1150480