Fabrication of semiconductor nanostructures by nanoindentation of photoresist layers using atomic force microscopy.
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| Title: | Fabrication of semiconductor nanostructures by nanoindentation of photoresist layers using atomic force microscopy. |
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| Authors: | Wiesauer, K., Springholz, G. |
| Source: | Journal of Applied Physics; December 15 2000, Vol. 88 Issue 12, p7289-7297, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1324693 |
