Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source.
Saved in:
| Title: | Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source. |
|---|---|
| Authors: | Park, Jaeyoung, Henins, I., Herrmann, H. W. |
| Source: | Journal of Applied Physics; January 1 2001, Vol. 89 Issue 1, p20-28, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/1.1323753 |
