Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source.
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| Title: | Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source. |
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| Authors: | Park, Jaeyoung, Henins, I., Herrmann, H. W. |
| Source: | Journal of Applied Physics; January 1 2001, Vol. 89 Issue 1, p15-19, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1323754 |
