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Process development and monitoring with atomic force profiling for CMP.

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Bibliographic Details
Title: Process development and monitoring with atomic force profiling for CMP.
Authors: Cunningham, Tim, Todd, Brad, Kalpathy-Cramer, Jayashree
Source: Solid State Technology; May2000, Vol. 43 Issue 7, p167-178, 12p
Database: Applied Science & Technology Source
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ISSN:0038111X