APA (7th ed.) Citation

Cunningham, T., Todd, B., & Kalpathy-Cramer, J. (2000). Process development and monitoring with atomic force profiling for CMP. Solid State Technology, 43(7), 167.

Chicago Style (17th ed.) Citation

Cunningham, Tim, Brad Todd, and Jayashree Kalpathy-Cramer. "Process Development and Monitoring with Atomic Force Profiling for CMP." Solid State Technology 43, no. 7 (2000): 167.

MLA (9th ed.) Citation

Cunningham, Tim, et al. "Process Development and Monitoring with Atomic Force Profiling for CMP." Solid State Technology, vol. 43, no. 7, 2000, p. 167.