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Liners for tungsten plug applications with long throw and ionized PVD.

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Bibliographic Details
Title: Liners for tungsten plug applications with long throw and ionized PVD.
Authors: Butler, D. C., Buchanan, Keith, Burgess, Stephen R.
Source: Solid State Technology; May2000, Vol. 43 Issue 7, p183-190, 8p
Database: Applied Science & Technology Source
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ISSN:0038111X