APA (7th ed.) Citation

Kugler, C., Bauer, F., Laimer, J., & Störi, H. (2001). Is there a way to improve the uniformity of TiN deposition conditions in large pulsed d.c. plasma CVD reactors? Vacuum, 61(2/4), 379. https://doi.org/10.1016/S0042-207X(01)00148-8

Chicago Style (17th ed.) Citation

Kugler, C., F. Bauer, J. Laimer, and H. Störi. "Is There a Way to Improve the Uniformity of TiN Deposition Conditions in Large Pulsed D.c. Plasma CVD Reactors?" Vacuum 61, no. 2/4 (2001): 379. https://doi.org/10.1016/S0042-207X(01)00148-8.

MLA (9th ed.) Citation

Kugler, C., et al. "Is There a Way to Improve the Uniformity of TiN Deposition Conditions in Large Pulsed D.c. Plasma CVD Reactors?" Vacuum, vol. 61, no. 2/4, 2001, p. 379, https://doi.org/10.1016/S0042-207X(01)00148-8.