Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties.
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| Title: | Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties. |
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| Authors: | Moon, B. K., Hironaka, K., Isobe, C. |
| Source: | Journal of Applied Physics; June 1 2001 pt1, Vol. 89 Issue 11, p6370-6377, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1353564 |
