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Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties.

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Bibliographic Details
Title: Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties.
Authors: Moon, B. K., Hironaka, K., Isobe, C.
Source: Journal of Applied Physics; June 1 2001 pt1, Vol. 89 Issue 11, p6370-6377, 8p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500750490
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties.
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  Data: <searchLink fieldCode="AU" term="%22Moon%2C+B%2E+K%2E%22">Moon, B. K.</searchLink><br /><searchLink fieldCode="AU" term="%22Hironaka%2C+K%2E%22">Hironaka, K.</searchLink><br /><searchLink fieldCode="AU" term="%22Isobe%2C+C%2E%22">Isobe, C.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; June 1 2001 pt1, Vol. 89 Issue 11, p6370-6377, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500750490
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.1353564
    Languages:
      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 6370
    Titles:
      – TitleFull: Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties.
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          Name:
            NameFull: Moon, B. K.
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            NameFull: Hironaka, K.
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            NameFull: Isobe, C.
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            – D: 01
              M: 06
              Text: June 1 2001 pt1
              Type: published
              Y: 2001
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              Value: 00218979
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              Value: 89
            – Type: issue
              Value: 11
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            – TitleFull: Journal of Applied Physics
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