Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate.
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| Title: | Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate. |
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| Authors: | Jeong, J.-h, Kwon, D., Lee, W.-S. |
| Source: | Journal of Applied Physics; August 1 2001, Vol. 90 Issue 3, p1227-1236, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1383263 |
