Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate.
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| Title: | Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate. |
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| Authors: | Jeong, J.-h, Kwon, D., Lee, W.-S. |
| Source: | Journal of Applied Physics; August 1 2001, Vol. 90 Issue 3, p1227-1236, 10p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 500781147 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Jeong%2C+J%2E-h%22">Jeong, J.-h</searchLink><br /><searchLink fieldCode="AU" term="%22Kwon%2C+D%2E%22">Kwon, D.</searchLink><br /><searchLink fieldCode="AU" term="%22Lee%2C+W%2E-S%2E%22">Lee, W.-S.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; August 1 2001, Vol. 90 Issue 3, p1227-1236, 10p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500781147 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.1383263 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 10 StartPage: 1227 Titles: – TitleFull: Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Jeong, J.-h – PersonEntity: Name: NameFull: Kwon, D. – PersonEntity: Name: NameFull: Lee, W.-S. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 08 Text: August 1 2001 Type: published Y: 2001 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 90 – Type: issue Value: 3 Titles: – TitleFull: Journal of Applied Physics Type: main |
| ResultId | 1 |