Investigation of defects in deposited oxides with a frequency resolved capacitance technique.
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| Title: | Investigation of defects in deposited oxides with a frequency resolved capacitance technique. |
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| Authors: | Caputo, Domenico, Irrera, Fernanda, Palma, Fabrizio |
| Source: | IEEE Transactions on Electron Devices; October 2001, Vol. 48 Issue 10, p2342-2347, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00189383 |
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| DOI: | 10.1109/16.954475 |
