Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions.
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| Title: | Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions. |
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| Authors: | Degani, Ofir, Nemirovsky, Yael |
| Source: | Journal of Microelectromechanical Systems; February 2002, Vol. 11 Issue 1, p20-26, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/84.982859 |
