Simple expression for vacancy concentrations at half ion range following MeV ion implantation of silicon.
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| Title: | Simple expression for vacancy concentrations at half ion range following MeV ion implantation of silicon. |
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| Authors: | Coleman, P. G., Burrows, C. P., Knights, A. P. |
| Source: | Applied Physics Letters; February 11 2002, Vol. 80 Issue 6, p947-949, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.1448856 |
